Rapid Preparation of Ferrite Films by Plasma-Enhanced MOCVD.
Open Access
- 1 January 1993
- journal article
- Published by The Magnetics Society of Japan in Journal of the Magnetics Society of Japan
- Vol. 17 (2), 319-322
- https://doi.org/10.3379/jmsjmag.17.319
Abstract
Oxide thin films of NiyZnxFe3-x-yO4 (0≤x+y≤1.0) were prepared with high deposition rates of 200∼300nm/min by plasma-enhanced MOCVD from mixed gas containing Fe (C5H7O2)3, Zn(C5H7O2)2, Ni (C5H7O2)2, and O2, at a RF power≥400W and temperature=600°C under high flow-rate conditions of source vapors, such as 2.35×10-5 mol/min for the Fe source. The XRD patterns of the films indicated that ZnxFe3-xO4 (0≤x≤0.8), NiyFe3-yO4 (0≤y≤1.0) and Ni0.4Zn0.4Fe2.2O4 films consisted of only a spinel phase with good crystallinity. However, a small (111) peak of NiO was found with the spinel peaks in the XRD pattern of the Ni0.8Zn0.2Fe2.0O4 film. SEM images of the films showed that they had densely columnar structures, irrespective of their compositions.Keywords
This publication has 7 references indexed in Scilit:
- Soft Magnetic Properties of Nickel Zinc Ferrite Films.Journal of the Japan Society of Powder and Powder Metallurgy, 1992
- Phase changes in plasma-sprayed zinc-nickel ferriteJournal of Applied Physics, 1991
- Preparation and magneto-optic properties of Bi-substituted yttrium iron garnet thin films by metalorganic chemical vapor depositionJournal of Applied Physics, 1991
- Deposition rate and surface smoothness of Fe3O4 films prepared by light-enhanced ferrite plating.Journal of the Magnetics Society of Japan, 1991
- Preparation of iron oxide films by plasma assisted (MO-CVD).Journal of the Japan Society of Powder and Powder Metallurgy, 1988
- Preparation of spinel ferrite thin films by plasma assisted MO-CVD.Journal of the Magnetics Society of Japan, 1988
- Magnetic ordering and domain-wall relaxation in zinc-ferrous ferritesPhysical Review B, 1976