The Spatial and Temporal Evolution of the Glow in an RF Discharge
- 1 April 1986
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 14 (2), 132-136
- https://doi.org/10.1109/tps.1986.4316515
Abstract
The temporal and spatial evolution of the glow in a 1.0- and 2.6-MHz radio-frequency (RF) excited discharge has been photographed with a high-speed framing camera. Evidence is presented showing electrons with a ballistic behavior in the body of the glow and a time delay between the maximum optical intensity of the glow and the maximum RF voltage. The effect of the dc self-bias on the glow is also shown. The implications of these observations on the dynamics of the ion motion in the plasma are discussed.Keywords
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