Fluorinated amorphous diamond-like carbon films deposited by plasma-enhanced chemical vapor deposition
- 10 June 2004
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 191 (2-3), 236-241
- https://doi.org/10.1016/j.surfcoat.2004.04.060
Abstract
No abstract availableKeywords
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