Optimization of parameters in matched spatial filter synthesis

Abstract
Criteria are provided for the selection of various matched spatial filter (MSF) synthesis parameters: the bias exposure (EB); beam balance ratio (K); and spatial frequency band (f*) in which K is set. The signal-to-noise ratio (SNR) and peak intensity (Ip) of the output correlation are used as measures of optimum correlation and a diffraction pattern sampling unit is used to insure reliable and reproducible data.