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Summary Abstract: Principles and application of ionized cluster beam deposition
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Summary Abstract: Principles and application of ionized cluster beam deposition
Summary Abstract: Principles and application of ionized cluster beam deposition
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Peter R. Younger
Peter R. Younger
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1 May 1985
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 3
(3)
,
588-589
https://doi.org/10.1116/1.572955
Abstract
No abstract available
Cited by 2 articles