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Monolithic integrated zinc-oxide on silicon pyroelectric anemometer
Home
Publications
Monolithic integrated zinc-oxide on silicon pyroelectric anemometer
Monolithic integrated zinc-oxide on silicon pyroelectric anemometer
DP
D.L. Polla
D.L. Polla
RM
R.S. Muller
R.S. Muller
RW
R.M. White
R.M. White
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1 January 1983
proceedings article
Published by
Institute of Electrical and Electronics Engineers (IEEE)
https://doi.org/10.1109/iedm.1983.190588
Abstract
No abstract available
Keywords
SILICON
MONOLITHIC INTEGRATED
PYROELECTRIC ANEMOMETER
INTEGRATED ZINC OXIDE
Cited by 6 articles