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Low-Temperature Epitaxial Growth of Single Crystalline Silicon from Silane
Home
Publications
Low-Temperature Epitaxial Growth of Single Crystalline Silicon from Silane
Low-Temperature Epitaxial Growth of Single Crystalline Silicon from Silane
DR
David Richman
David Richman
RA
Robert H. Arlett
Robert H. Arlett
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1 January 1969
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 116
(6)
,
872
https://doi.org/10.1149/1.2412092
Abstract
No abstract available
Keywords
SINGLE CRYSTALLINE
LOW TEMPERATURE
SILANE
CRYSTALLINE SILICON
TEMPERATURE EPITAXIAL GROWTH
Cited by 14 articles