Mesoscale actuator device: micro interlocking mechanism to transfer macro load
- 9 March 1999
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 73 (1-2), 30-36
- https://doi.org/10.1016/s0924-4247(98)00251-9
Abstract
No abstract availableKeywords
This publication has 17 references indexed in Scilit:
- Modeling piezoelectric stack actuators for control of micromanipulationIEEE Control Systems, 1997
- Design and Performance of a Rotary Motor Driven by Piezoelectric Stack ActuatorsJapanese Journal of Applied Physics, 1996
- Ferroelectric-based microactuatorsIntegrated Ferroelectrics, 1995
- Vibration reduction in rotorcraft using active control - A comparison of various approachesJournal of Guidance, Control, and Dynamics, 1995
- Design of a scanning probe microscopeMeasurement Science and Technology, 1994
- Characterization of an inchworm prototype motorSensors and Actuators A: Physical, 1994
- Slow Crack Growth in Single-Crystal SiliconScience, 1992
- A Self-Sensing Piezoelectric Actuator for Collocated ControlJournal of Intelligent Material Systems and Structures, 1992
- Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation LayersJournal of the Electrochemical Society, 1990
- The application of capacitance micrometry to the control of Fabry-Perot etalonsJournal of Physics E: Scientific Instruments, 1984