The application of capacitance micrometry to the control of Fabry-Perot etalons
- 1 January 1984
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 17 (1), 49-55
- https://doi.org/10.1088/0022-3735/17/1/010
Abstract
Using the technique of capacitance micrometry it is possible to measure very small displacements. The authors describe the application of this technique to the control of piezo-scanned Fabry-Perot etalons using a closed-loop feedback system. This system removes the problem of the nonlinear response and hysteresis associated with piezoelectric transducers and allows precise control of both etalon gap and parallelism.Keywords
This publication has 7 references indexed in Scilit:
- A narrow gap, servo-controlled tunable Fabry-Perot filter for astronomyMonthly Notices of the Royal Astronomical Society, 1981
- Computer-controlled Fabry-Perot interferometer for Brillouin spectroscopyApplied Optics, 1979
- A method for stabilising an air-spaced Fabry-Perot etalonJournal of Physics E: Scientific Instruments, 1977
- A servo controlled Fabry-Perot interferometer using capacitance micrometers for error detectionJournal of Physics E: Scientific Instruments, 1974
- The design and some applications of sensitive capacitance micrometersJournal of Physics E: Scientific Instruments, 1973
- Automatic Control of the Spacing of Fabry–Perot InterferometersApplied Optics, 1966
- A Rapid-Scanning Fabry-Perot Interferometer with Automatic Parallelism ControlApplied Optics, 1962