Atomic layer deposition of zirconium oxide from zirconium tetraiodide, water and hydrogen peroxide
- 30 September 2001
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 231 (1-2), 262-272
- https://doi.org/10.1016/s0022-0248(01)01449-x
Abstract
No abstract availableKeywords
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