The Ellipsometer, an Apparatus to Measure Thicknesses of Thin Surface Films
- 1 February 1945
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 16 (2), 26-30
- https://doi.org/10.1063/1.1770315
Abstract
An apparatus designed to determine the thickness of films deposited on metal slides is described. It is based on the measurement of the change that takes place in ellipticity of the light reflected after a slide has been coated with the film under investigation. The apparatus is capable of measuring a film thickness within ±0.3A, a sensitivity at least ten times greater than that obtained with the method based on light interference.This publication has 3 references indexed in Scilit:
- Built-Up Films of Barium Stearate and Their Optical PropertiesPhysical Review B, 1937
- Beiträge zur Kenntnis der Oberflächenschichten auf MetallenAnnalen der Physik, 1920
- Bestimmung der optischen Constanten der MetalleAnnalen der Physik, 1890