Computer studies of dechanneling effects on ion implantation profiles
- 1 August 1971
- journal article
- Published by Springer Nature in Lettere al Nuovo Cimento (1971-1985)
- Vol. 2 (8), 390-394
- https://doi.org/10.1007/bf02780417
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Electronic and nuclear contributions to dechannellingLettere al Nuovo Cimento (1971-1985), 1970
- Energy loss of protons channelling through very thin goldPhilosophical Magazine, 1970
- Periodic Dependence of the Electronic Stopping Cross Section for Energetic Heavy Ions in SolidsPhysical Review B, 1968
- Implantation profiles of 32P channeled into silicon crystalsCanadian Journal of Physics, 1968
- Channeling of medium-mass ions through siliconCanadian Journal of Physics, 1968
- Computer Studies of the Slowing Down of Energetic Atoms in CrystalsPhysical Review B, 1963