Metalorganic chemical vapor deposition of PbTiO3 thin films

Abstract

PbTiO₃ thin films have been grown successfully for the first time by using purely metalorganic precursors, namely, titanium isopropoxide and tetraethyllead. A scanning electron micrograph showed dense and noncolumnar growth with good surface morphology. Temperature‐dependent x‐ray diffraction studies provide evidences for a reversible tetragonal to cubic phase transition around 540 °C. At room temperature, the dielectric constant is about 180.