Electrochemically measured porosity of magnetron sputtered TiN films deposited at various substrate orientations

Publisher Website

1 November 1986

journal article
Published by American Vacuum Society in Journal of Vacuum Science & Technology A

Vol. 4 (6), 2691-2694
https://doi.org/10.1116/1.573707

Abstract

No abstract available

Keywords

MAGNETRON SPUTTERING

Cited by 18 articles