A New High Resolution Reflection Scanning Electron Microscope
- 1 August 1969
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 40 (8), 1040-1045
- https://doi.org/10.1063/1.1684146
Abstract
A new high resolution reflection scanning electron microscope has been built with a lanthanum hexaboride cathode electron gun, a contamination‐free vacuum system, and in which the deteriorating eflects of vibration and ac stray field interference have been reduced below significant levels. The microscope produces a minimum probe diameter of 30±7 Å with a current of 10−12 A at a working distance of 7 mm and an accelerating voltage of 23 kV. Point‐to‐point resolution of 50±10 Å has been measured in scanning reflection.Keywords
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