Design of a Microactuator Array Against the Coupled Nature of Microelectromechanical Systems (MEMS) Processes
- 1 January 2000
- journal article
- Published by Elsevier in CIRP Annals
- Vol. 49 (1), 101-104
- https://doi.org/10.1016/s0007-8506(07)62905-9
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Micromachined Thin-Film Mirror Array for Reflective Light ModulationCIRP Annals, 1997
- Design of Software System Based on Axiomatic DesignCIRP Annals, 1991
- Design of Thinking Design MachineCIRP Annals, 1990