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Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists
Home
Publications
Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists
Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists
MG
Michael T. Gale
Michael T. Gale
MR
Markus Rossi
Markus Rossi
JP
Joern Pedersen
Joern Pedersen
HS
Helmut Schuetz
Helmut Schuetz
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1 November 1994
journal article
Published by
SPIE-Intl Soc Optical Eng
in
Optical Engineering
Vol. 33
(11)
,
3556-3566
https://doi.org/10.1117/12.179892
Abstract
No abstract available
Keywords
DIRECT WRITE LITHOGRAPHY
FABRICATION
MICRO OPTICS
PHOTORESIST MATERIALS
Cited by 189 articles