Quality factor control for micromechanical resonators
- 1 January 1992
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. ba21 a23 (01631918), 505-508
- https://doi.org/10.1109/iedm.1992.307411
Abstract
The implementation of very high Q microelectromechanical filters, constructed of spring-coupled or parallel resonators, requires strict control over the quality factor of the constituent resonators. This report details electrostatic feedback techniques which allow precise control of the quality factor of a micromechanical resonator device, independent of the ambient operating pressure of the micromechanical system. Theoretical formulas governing Q-control are derived and experimentally verified.Keywords
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