Humidity sensor structures with thin film porous alumina for on-chip integration
- 1 September 2009
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 517 (22), 6198-6201
- https://doi.org/10.1016/j.tsf.2009.04.010
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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