Sensors Utilizing Thin-Membrane SAW Oscillators

Publisher Website

1 January 1981

conference paper
conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 159-162
https://doi.org/10.1109/ultsym.1981.197601

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

Anisotropic etching of silicon
IEEE Transactions on Electron Devices, 1978

Cited by 13 articles