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Reactant supply in reactive ion etching
Home
Publications
Reactant supply in reactive ion etching
Reactant supply in reactive ion etching
JM
John L. Mauer
John L. Mauer
JL
Joseph S. Logan
Joseph S. Logan
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1 March 1979
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 16
(2)
,
404-406
https://doi.org/10.1116/1.569959
Abstract
No abstract available
Keywords
REACTIVE ION ETCHING
Cited by 14 articles