Anomalous Residual Defects in Silicon after Annealing of Through-Oxide Phosphorus Implanted Samples

Publisher Website

1 January 1976

conference paper
Published by Japan Society of Applied Physics

https://doi.org/10.7567/ssdm.1976.a-1-4

Abstract

1976 International Conference on Solid State Devices,Search for presentations

Keywords

Cited by 1 article