Beam-Induced Damage to Thin Specimens in an Intense Electron Probe
- 9 December 2005
- journal article
- microanalysis
- Published by Oxford University Press (OUP) in Microscopy and Microanalysis
- Vol. 12 (01), 65-71
- https://doi.org/10.1017/s1431927606060065
Abstract
We have investigated the changes produced in single-element and two-layer transmission electron microscope (TEM) specimens irradiated by an intense nanometer-sized electron probe, such as that produced in a field-emission or aberration-corrected TEM. These changes include hole formation and the accumulation of material within the irradiated area. The results are discussed in terms of mechanisms, including electron-beam sputtering and surface diffusion. Strategies for minimizing the effect of the beam are considered.Keywords
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