Use of Modified Free Energy Theorems to Predict Equilibrium Growing and Etching Shapes
- 1 August 1962
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 33 (8), 2643-2647
- https://doi.org/10.1063/1.1729036
Abstract
This paper offers a construction that gives the limiting or ``equilibrium'' shape of an etching crystal. The conditions for hillock and pit stability and face rounding are also obtained. Experimentally, germanium cylinders with different zone axes were etched to develop ``equilibrium cross sections.'' These were in good agreement with the construction. Other uses of the construction are discussed.Keywords
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