One-chip multichannel quartz crystal microbalance (QCM) fabricated by Deep RIE
- 1 May 2000
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 82 (1-3), 139-143
- https://doi.org/10.1016/s0924-4247(99)00330-1
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology (10305033)
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