Analytical microscopy by secondary ion imaging techniques

Abstract

The technique of mapping the distribution of the various component elements or isotopes over an extended area of a solid sample, with high spatial resolution, by using secondary ion emission, was first proposed by the authors 20 years ago. One of the essential points was that no scanning procedure was required for getting the distribution map of the various components; such maps were obtained directly by an imaging technique. We present here the main features of that procedure of 'analytical microscopy' which made it possible for the first time to produce high resolution images with a mass spectrometer.