Structure and electrical conductivity of cosputtered gold-chromium alloy films

Abstract

Cosputtering of Au and Cr produces polycrystalline thin films in the entire compositional range up to solubility limits of 49 at.% Cr in Au corresponding to the phase diagram of bulk material. Compositions of the Au–Cr system were checked by electron-probe microanalysis. The change in lattice constant with addition of Cr in Au shows exactly the same deviation from Vegard's law as bulk. The resistivity changes with increasing Cr content are presented and the temperature coefficient is found to be constant in the range -150–160°C.