Power Feeding in Large Area PECVD of Amorphous Silicon

Publisher Website

1 January 1995

journal article
Published by Springer Nature in MRS Proceedings

Vol. 377
https://doi.org/10.1557/proc-377-27

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

Long Plasma Production by a Radio-Frequency Discharge between Dielectric-Covered Parallel Electrodes
Japanese Journal of Applied Physics, 1990

Cited by 26 articles