The synthesis of cubic BN films using a hot cathode plasma discharge in a parallel magnetic field
- 5 December 1990
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 43-44, 128-136
- https://doi.org/10.1016/0257-8972(90)90067-m
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Preparation of Boron Nitride Films by Reactive SputteringJournal of the Japan Institute of Metals and Materials, 1988
- Formation of cBN films by arc-like plasma enhanced ion plating method.SHINKU, 1988
- Function of Substrate Bias Potential for Formation of Cubic Boron Nitride Films in Plasma CVD TechniqueJapanese Journal of Applied Physics, 1987
- Effects of charge neutralization on ion-beam-deposited boron nitride filmsJournal of Vacuum Science & Technology A, 1985
- Preparation and properties of hard i-C and i-BN coatingsThin Solid Films, 1982