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Novel micromachined cantilever sensors for scanning near‐field optical microscopy
Home
Publications
Novel micromachined cantilever sensors for scanning near‐field optical microscopy
Novel micromachined cantilever sensors for scanning near‐field optical microscopy
SM
S. Münster
S. Münster
SW
S. Werner
S. Werner
CM
C. Mihalcea
C. Mihalcea
WS
W. Scholz
W. Scholz
E. Oesterschulze
E. Oesterschulze
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1 April 1997
journal article
Published by
Wiley
in
Journal of Microscopy
Vol. 186
(1)
,
17-22
https://doi.org/10.1046/j.1365-2818.1997.00173.x
Abstract
No abstract available
Keywords
SCANNING NEAR‐FIELD OPTICAL MICROSCOPY
SNOM
SCANNING FORCE MICROSCOPY
SFM
CANTILEVER
SUBWAVELENGTH RESOLUTION
HFCVD DIAMOND MEMBRANE
Cited by 26 articles