Mechanical testing of thin metallic films
- 1 November 1992
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 220 (1-2), 265-270
- https://doi.org/10.1016/0040-6090(92)90583-w
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Mechanical properties of thin filmsMetallurgical Transactions A, 1989
- Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin filmsJournal of Materials Research, 1988
- Mechanical properties and microstructures of Al-1%Si thin film metallizationsThin Solid Films, 1987
- A tensile testing machine for evaporated thin metal filmsJournal of Physics E: Scientific Instruments, 1983
- Capacitance Extensometers for Microstrain MeasurementsReview of Scientific Instruments, 1963