Abstract
The interpretation of ion scattering data relies heavily on computer simulation. The present paper makes an important contribution to this field by introducing a new (semi-analytical calculational model. This model allows the characteristics of the energy and angular distributions of reflected particles to be simulated by calculating a single integral. The model takes into account the influence of surface thermal vibrations. The method is outlined in detail and the results agree well with former calculations. The presently required computer times are about two orders of magnitude smaller. The potentialities of this simulational approach are illustrated in some special topics.