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Silicon Nitride Coatings on Molybdenum by RF Reactive Ion Plating
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Silicon Nitride Coatings on Molybdenum by RF Reactive Ion Plating
Silicon Nitride Coatings on Molybdenum by RF Reactive Ion Plating
MF
Masao Fukutomi
Masao Fukutomi
MK
Masahiro Kitajima
Masahiro Kitajima
MO
Masatoshi Okada
Masatoshi Okada
RW
Ryoji Watanabe
Ryoji Watanabe
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1 September 1977
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 124
(9)
,
1420-1424
https://doi.org/10.1149/1.2133666
Abstract
No abstract available
Cited by 18 articles