Internal reflection ellipsometry for metal deposits
- 1 October 1972
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 43 (10), 4027-4030
- https://doi.org/10.1063/1.1660869
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Ellipsometric Study of Ni–P Film SurfacesJournal of Applied Physics, 1972
- Optical Properties of NiO and CoOPhysical Review B, 1970
- Ellipsometric Technique for Obtaining Substrate Optical ConstantsJournal of Applied Physics, 1970
- Optical Constants of Sodium and Potassium from 0.5 to 4.0 eV by Split-Beam EllipsometryPhysical Review B, 1969
- Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometryJournal of Research of the National Bureau of Standards Section A: Physics and Chemistry, 1963