Crystalline Ag Nanocluster-Incorporated RuO[sub 2] as an Electrode Material for Thin-Film Micropseudocapacitors

Abstract

We prepared crystalline Ag nanocluster-incorporated electrodes using a radio frequency magnetron cosputtering system for use in thin-film micropseudocapacitors and investigated their structural and electrochemical properties. High-resolution electron microscopy, X-ray diffraction, and X-ray photoelectron spectroscopy results show that crystalline Ag nanoclusters are well dispersed within an amorphous . The Ag nanocluster-incorporated electrodes show much higher capacitance of at with superb high-rate performance compared to -only electrodes. The improved capacitance is explained in terms of the presence of dispersed Ag nanoclusters embedded within the amorphous matrix having good electrical conductivity.