Diamond membranes for x-ray masks
- 31 March 1992
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 17 (1-4), 175-179
- https://doi.org/10.1016/0167-9317(92)90036-q
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Properties of diamond membranes for x-ray lithographyJournal of Applied Physics, 1990
- Radiation stability of SiC and diamond membranes as potential x-ray lithography mask carriersJournal of Vacuum Science & Technology B, 1990
- Silicon Membrane Mask Blanks for X-Ray and Ion Projection LithographyJapanese Journal of Applied Physics, 1990
- 75-mm diameter diamond x-ray membranePublished by SPIE-Intl Soc Optical Eng ,1990