Transparent conducting indium doped ZnO films by dc reactive S-gun magnetron sputtering
- 15 July 1989
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 28 (14), 2817-2819
- https://doi.org/10.1364/ao.28.002817
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.This publication has 4 references indexed in Scilit:
- Highly conductive and transparent ZnO thin films prepared by r.f. magnetron sputtering in an applied external d.c. magnetic fieldThin Solid Films, 1985
- Transparent conducting zinc oxide and indium–tin oxide films prepared by modified reactive planar magnetron sputteringJournal of Vacuum Science & Technology A, 1983
- Transparent heat-reflecting coatings based on highly doped semiconductorsThin Solid Films, 1981
- Anomalous Optical Absorption Limit in InSbPhysical Review B, 1954