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Chemical Vapor Deposition of Ruthenium and Ruthenium Dioxide Films
Home
Publications
Chemical Vapor Deposition of Ruthenium and Ruthenium Dioxide Films
Chemical Vapor Deposition of Ruthenium and Ruthenium Dioxide Films
MG
M. L. Green
M. L. Green
MG
M. E. Gross
M. E. Gross
LP
L. E. Papa
L. E. Papa
KS
K. J. Schnoes
K. J. Schnoes
DB
D. Brasen
D. Brasen
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1 November 1985
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 132
(11)
,
2677-2685
https://doi.org/10.1149/1.2113647
Abstract
No abstract available
Cited by 205 articles