Polarimetry of thin metal transmission gratings in the resonance region and its impact on the response of metal-semiconductor-metal photodetectors
- 19 May 1997
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 70 (20), 2673-2675
- https://doi.org/10.1063/1.118990
Abstract
The resonance behavior of metal transmission gratings and its impact on the response of metal-semiconductor-metal (MSM) photodetectors have been studied experimentally and theoretically. The metal gratings, with finger spacings in the subwavelength region of the visible light, were fabricated using e-beam lithography and lift-off. Strong resonances have been observed only in the S polarization. As a result, the light transmitted through a grating is primarily S polarized if the grating’s finger spacing is less than one-third of the wavelength of the incident light, but P polarized otherwise. Similar phenomenon has been observed in the response of MSM photodetectors since the fingers (electrodes) of an MSM photodetector basically form a grating. Theoretical simulations employing the rigorous modal-expansion theory fairly predict the observed phenomenon.Keywords
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