Rankings
Publications
Search Publications
Cited-By Search
Sources
Publishers
Scholars
Scholars
Top Cited Scholars
Organizations
About
Login
Register
Home
Publications
Ion species dependence of focused-ion-beam lithography
Home
Publications
Ion species dependence of focused-ion-beam lithography
Ion species dependence of focused-ion-beam lithography
SM
Shinji Matsui
Shinji Matsui
KM
Katsumi Mori
Katsumi Mori
TS
Takao Shiokawa
Takao Shiokawa
KT
Koichi Toyoda
Koichi Toyoda
SN
Susumu Namba
Susumu Namba
Publisher Website
Google Scholar
Add to library
Cite
Download
Share
Download
1 July 1987
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 5
(4)
,
853-857
https://doi.org/10.1116/1.583679
Abstract
No abstract available
Cited by 18 articles