Surface-elastic-wave properties of dc-triode-sputtered zinc oxide films
- 15 October 1972
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 21 (8), 389-391
- https://doi.org/10.1063/1.1654425
Abstract
Measurements at frequencies above 200 MHz have been made of the coupling factor, phase velocity, and propagation loss of dc‐triode‐sputtered zinc oxide film layers on oxidized silicon and fused quartz. Values of 2.2% have been obtained for k2. Propagation losses of 8.0 dB/μsec were observed at 630 MHz. The measurements strongly suggest that sputtered zinc oxide films can be obtained whose quality approaches very closely that of single‐crystal zinc oxide.Keywords
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