Materials surface modification by plasma bombardment under simultaneous erosion and redeposition conditions
- 1 May 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 23 (4), 458-470
- https://doi.org/10.1016/0168-583x(87)90471-x
Abstract
No abstract availableKeywords
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