Effect of optical power on the resonance frequency of optically powered silicon microresonators
- 30 September 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 29 (1), 73-78
- https://doi.org/10.1016/0924-4247(91)80033-l
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Optically activated silicon microresonator transducers: An assessment of material propertiesSensors and Actuators A: Physical, 1991
- Transient excitation of silicon microresonatorElectronics Letters, 1989
- Self-excited vibrations of optical microresonatorsElectronics Letters, 1988
- Silicon resonator sensors: interrogation techniques and characteristicsIEE Proceedings D Control Theory and Applications, 1988
- Optically Excited And Interrogated Micromechanical Silicon Cantilever StructurePublished by SPIE-Intl Soc Optical Eng ,1987
- Micromechanical resonators in fiber-optic systemsOptics Letters, 1987
- Optically excited resonant beam pressure sensorElectronics Letters, 1987
- Resonator sensors-a reviewJournal of Physics E: Scientific Instruments, 1985
- Optically activated vibrations in a micromachined silica structureElectronics Letters, 1985
- Optical fiber sensor technologyIEEE Journal of Quantum Electronics, 1982