A novel deposit/spin waveguide interconnection (DSWI) for semiconductor integrated optics
- 1 October 1982
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Quantum Electronics
- Vol. 18 (10), 1783-1789
- https://doi.org/10.1109/jqe.1982.1071396
Abstract
We propose an efficient and simple optical interconnection between active semiconductor components by deposition and spin coating. Details of the waveguide design, the fabrication technique, and a promising material combination are given. Experimental results with an integrated laser-polyimide/SiOx(x \sim 2) waveguide combination demonstrate low-threshold (2.0 kA/cm2) laser operation and a low-loss waveguide interconnection (81 percent coupling efficiency) on a GaInAsP/InP chip.Keywords
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