Carbon nanotube tipped atomic force microscopy for measurement of <100 nm etch morphology on semiconductors
- 27 July 1998
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 73 (4), 529-531
- https://doi.org/10.1063/1.122069
Abstract
No abstract availableKeywords
This publication has 19 references indexed in Scilit:
- Nanotubes as nanoprobes in scanning probe microscopyNature, 1996
- Exceptionally high Young's modulus observed for individual carbon nanotubesNature, 1996
- Luminescence properties of submicron features fabricated by using magnetron reactive ion etching with different sample biasesApplied Physics Letters, 1995
- Annealing effect on carbon nanotubes. An ESR studyChemical Physics Letters, 1995
- Morphological Restoration of Atomic Force Microscopy ImagesLangmuir, 1995
- Carbon NanotubesAnnual Review of Materials Science, 1994
- Chemically Assisted Ion Beam Etching for Silicon‐Based MicrofabricationJournal of the Electrochemical Society, 1994
- Vapor-Condensation Generation and STM Analysis of Fullerene TubesScience, 1993
- Are fullerene tubules metallic?Physical Review Letters, 1992
- A novel anisotropic dry etching techniqueJournal of Vacuum Science and Technology, 1981