Control of Dislocations and Stress in AlGaN on Sapphire Using a Low Temperature Interlayer
- 9 November 1999
- journal article
- research article
- Published by Wiley in Physica Status Solidi (b)
- Vol. 216 (1), 683-689
- https://doi.org/10.1002/(sici)1521-3951(199911)216:1<683::aid-pssb683>3.0.co;2-4