The integration of micro-machine fabrication with electronic device fabrication on III-V semiconductor materials
- 9 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- GaAs MMIC yield modelingPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A study of three microfabricated variable-capacitance motorsSensors and Actuators A: Physical, 1990
- Micromechanical light modulator array fabricated on siliconApplied Physics Letters, 1977