A technology for the monolithic fabrication of a pressure sensor and related circuitry
- 28 February 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 46 (1), 133-136
- https://doi.org/10.1016/0924-4247(94)00876-j
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Analysis of nonlinearity in high sensitivity piezoresistive pressure sensorsSensors and Actuators A: Physical, 1993
- A novel structure of pressure sensorsIEEE Transactions on Electron Devices, 1991
- Study of electrochemical etch-stop for high-precision thickness control of silicon membranesIEEE Transactions on Electron Devices, 1989