Silicon epitaxial growth
- 1 December 1972
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 17, 241-248
- https://doi.org/10.1016/0022-0248(72)90253-9
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
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- Surface Orientation Effect of the Shadow of the Stacking FaultJournal of Applied Physics, 1969
- Epitaxial Growth with Light IrradiationJapanese Journal of Applied Physics, 1968
- Geometrical Stability of Shallow Surface Depressions During Growth of (111) and (100) Epitaxial SiliconJournal of the Electrochemical Society, 1968
- Vapor Phase Deposition and Etching of SiliconJournal of the Electrochemical Society, 1965
- Kinetics of Silicon Crystal Growth from SiCl[sub 4] DecompositionJournal of the Electrochemical Society, 1962
- Epitaxial Silicon Films by the Hydrogen Reduction of SiCl[sub 4]Journal of the Electrochemical Society, 1961