Difference Auger spectroscopy for studying small quantities of elements on metallic surfaces

Abstract

Increased sensitivity in the detection of small amounts of impurities has been demonstrated by using a difference technique in Auger electron spectroscopy. The primary electron beam is switched at a frequency of 30 Hz between two points or two samples of interest. The signals from the two samples are subtracted electronically so that the final output is the difference of the Auger spectra from the two samples and is therefore sensitive to small differences in composition between the samples.